JPH0525683Y2 - - Google Patents
Info
- Publication number
- JPH0525683Y2 JPH0525683Y2 JP600888U JP600888U JPH0525683Y2 JP H0525683 Y2 JPH0525683 Y2 JP H0525683Y2 JP 600888 U JP600888 U JP 600888U JP 600888 U JP600888 U JP 600888U JP H0525683 Y2 JPH0525683 Y2 JP H0525683Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- air blowing
- filter plate
- filter
- blowing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007664 blowing Methods 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP600888U JPH0525683Y2 (en]) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP600888U JPH0525683Y2 (en]) | 1988-01-22 | 1988-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01110817U JPH01110817U (en]) | 1989-07-26 |
| JPH0525683Y2 true JPH0525683Y2 (en]) | 1993-06-29 |
Family
ID=31209876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP600888U Expired - Lifetime JPH0525683Y2 (en]) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0525683Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6253236B2 (ja) * | 2013-02-15 | 2017-12-27 | 三菱電機株式会社 | 除塵装置及び空気調和装置 |
-
1988
- 1988-01-22 JP JP600888U patent/JPH0525683Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01110817U (en]) | 1989-07-26 |
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